Strong etching formulation (time and rate) for PADC with deep depth bulk etch rate study

نویسندگان

چکیده

Aqueous NaOH with ethanol (strong) etchant is widely used. It shortens etching time effectively compared to normal conditions (6.25N at 70 °C). Two equations have been proposed calculate the molarity and volume. Another two empirical were introduced for estimating bulk etch rates of PADC etched in strong etchant. Up now, there no such available literature that can predict V b volumes. The fundamental models stemming from literature. Fast enables follow-up rate variation versus depth detector material up ? 80 ? m. In agreement previous studies, an equation given which allows variations be expressed under form a reciprocal normalized (i.e., removed layer). • Bulk CR-39 NaOH/ethanol are presented. Advantages NaOH+ethanol against standard aqueous solutions considered. New as function volume given. corresponding illustrated.

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ژورنال

عنوان ژورنال: Nuclear Instruments and Methods in Physics Research

سال: 2021

ISSN: ['1872-9576', '0168-9002']

DOI: https://doi.org/10.1016/j.nima.2021.165402